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| Ultima descărcare din IBN: 2021-08-06 09:51 |
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| 537.311.322+621.382 (2) |
| Electricitate curentă. Curent electric. Electrocinetică (90) |
| Electrotehnică (1161) |
 SM ISO690:2012OSADCHUK, V., OSADCHUK, A., KRYLIK, L., SELETSKA, O.. Microelectronic humidity–frequency transducer with humidity-sensitive capacitive elements. In: Moldavian Journal of the Physical Sciences, 2017, nr. 1-2(16), pp. 94-100. ISSN 1810-648X. |
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| Moldavian Journal of the Physical Sciences | ||||||
| Numărul 1-2(16) / 2017 / ISSN 1810-648X /ISSNe 2537-6365 | ||||||
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| CZU: 537.311.322+621.382 | ||||||
| Pag. 94-100 | ||||||
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| Rezumat | ||||||
A microelectronic transducer with capacitive elements implementing the principle of humidity to frequency conversion has been developed. Experiments has been conducted for samples of Р14 Rapid humidity-sensitive capacitors (Wired and SMD) of Innovative sensor technology company, HСH-1000 humidity-sensitive capacitors of Honeywell company, and humidity-sensitive MOS capacitor of Helium Research Institute ((Vinnytsya, Ukraine). The essential effect of the physical and chemical properties of the humidity-sensitive layer of the capacitive element on the sensitivity of the humidity–frequency transducer has been experimentally proved. In a range of 18–99% of humidity, the transducer with a humiditysensitive MOS capacitor based on amorphous silicon has the highest sensitivity of 3500 Hz/%. The range of change in the oscillation frequency is 320 kHz. |
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