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 SM ISO690:2012АНУФРИЕВ, Л., ТУРЦЕВИЧ, А., ГЛУХМАНЧУК, В., СОЛОВЬЕВ, Я., БАРАНОВ, В.. Исследование влияния условий формирования на свойства тонких пленок молибдена, нанесенных магнетронным распылением. In: Электронная обработка материалов, 2004, nr. 3(40), pp. 70-74. ISSN 0013-5739. |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
 Электронная обработка материалов |
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| Numărul 3(40) / 2004 / ISSN 0013-5739 /ISSNe 2345-1718 | ||||||
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| Pag. 70-74 | ||||||
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The study of the basic electrophysical parameters of thin Mo films obtained by magnetron sputtering depending on the conditions of deposition was made. It is shown that the films obtained at deposition rate about 4 nm/s and at less than 1 Pa Argon pressure to the substrates heated up to temperature over 450C have the best reproducibility. |
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